3D-Nanofinger®

Versions

3d Nanofinger 2

Stand alone version

  • Arrangement with 50x50x20 mm3 stroke and thermally compensated granite frame. This Setup is usually used when the 3D-Nanofinger® operates at a fixed place and not in combination with other machines.
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Mobile version

  • Arrangement with 20x20x20 mm3 stroke in a case with transportable electronics. This design shows the compact size of the 3D-Nanofinger® and its flexible usage.
  • This version is recommended when measurements are required at different places/branches and the ultimate precision is not as important as the portability.
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CNC version

  • The 3D-Nanofinger® is so compact that it can be installed even in CNC production machines. The metrology features of the 3D-Nanofiner allow sample and tool control at any time and even in automation.
Nanofinger V Nut

SEM/FIB version

  • As part of the Nanoworkbench this version supports linescans and 3D scans within elctron microscopes. The 3D-Nanofinger® is so compact that it can be installed even in a scanning electron microscope (SEM) and a focussed ion beam chamber (FIB).
  • The metrology features of a SEM are then expanded to the third Dimension. In particular in a FIB the 3D-Nanofinger® can determine how deep a structure is, immediately after it was produced by the ion beam of the FIB.
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Testing bench version

  • The universal testing benches allow product development, prototyping, reverse engineering, measurement & quality control, failure detection & analysis with only one system and in until now unknown precision. The accuracy of the base stage is better 50 nm.
  • This modular system can include all application packeges like:  nanomanipulators, nao probing, force sensors, indenters, inspection Systems.
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Micro production version

  • The 3D-Nanofinger® can also be included in all of our micro production Systems. Those can have up to 16 degrees of movement, several micro-gripper, micro adhesive bonding technology, a 4 axis path control system, 6 video microscopes for pattern recognition and automatic microassembly.
  • The 3D-Nanofinger® adds a valuable topography and scouting system to ensure reliable automation.

The 3D-Nanofinger®

  • covers the features of Profilometers and 3D Coordinate Measuring Machines by three equivalent axes of movement and measurements along a path, not only along one axis – with a resolution of single Nanometers on Centimeters of stroke.
  • detects a contact with its sensor vertically and sidewise: fully 3D.
  • measures 3D-profiles, inner and outer contours, dimensional features as well as surface roughness, also sidewise.
  • overcomes the restrictions of Profilometers, Coordinate Measuring Machines and AFMs.
  • is part of our Nanorobotics and can be integrated in all our systems, freely programmable from point operations to complete measurement tasks.
  • 3 axes with 10 – 50 mm stroke in xy and 10-20 mm stroke in z
  • 0.5 nm movement resolution
  • 2 nm position sensor resolution
  • scan resolution up to 2 nm (setup dependent)
  • Nanofinger® probe tips can have different shape, hardness and a radius from 50 nm up to a few mm, e.g. to operate as manipulation tool
  • 1d measurements as Scout
  • 2d measurements for linescans
  • 3d topography measurements for coarse and fine sample structures
  • dimensional measurements in all directions
  • automation on many different levels, also within other processes
  • Adding 3D to conventional SEM or FIB surface imaging information – In situ Surface Sensing and Nanoprofilometry for Focused Electron and Ion Beam Induced Processes Verification
    Andre Linden, Frank Nouvertné, Axel Rudzinski, Torsten Michael, Mark Levermann, Eva Maynicke
    Download PDF
  • 3d Nanofinger
    Raith GmbH
    Download PDF
  • eLINE Plus
    Raith GmbH
    Download PDF

Principle of operation

  • The Nanofinger® sensor is a small MEMS device that detects the distance between its probe tip and a sample. In a distance of about 10 nm the Nanofinger® sensor detects the sample by measuring the Van-Der-Vaals forces between sample and tip – without touching the sample.
  • The Nanofinger® sensor is driven by a special high speed electronics that reacts with a bandwidth of several KHz. The Nanofinger® sensor is moved towards a sample in closed loop with 1 nm increments until it reaches the desired signal value (e.g. at 75% amplitude). At this moment the position of the stage that moves this sensor is stored as coordinate data. The Nanofinger® sensor is removed again and then moved aside for the next approach, at any time in closed loop with 1 nm increments, in any direction X, or Y or Z over Centimeters stroke.
  • Since all movement axes of the 3D-Nanofinger® offer 1 nm movement resolution, it is easy to prepare a 3d image by making arrays of Linescans.

Flexible usage

  • The 3D-Nanofinger® is one module of our Nanorobotics and can be moved and programmed just as any other sensor or actuator in the system.
  • As a module the 3D-Nanofinger® can be used stand-alone or inside of Nanorobotics and micro production systems or e.g. CNC machines.
  • Within the “Nanoworkbench” from Klocke Nanotechnik the 3D-Nanofinger® can be used in any SEM/FIB system as “Scout” to guide other tools to the sample or for 3d Topography measurements. A “Live Image Positioning” module directs the Nanofinger® in xy to the target point just by mouse-click into the SEM Image.
  • The Nanofinger® can be programmed by simple teaching like all other tool of the system, e.g. for Scouting, for finding a maximum point on a sample measure the height or guide an electrical probe there. Even full 3d-profiles can be parts of a bigger process.

®: Nanofinger is a registered trademark of Klocke Nanotechnik GmbH, Aachen

Measurements

Nanofinger V Nut

Optical materials

  • Measurment of V grooves that were prepared as glass fiber guides in the optical industry.
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TFT Display

  • 3 and 4 facet pyramid Patterns from METAL INDUSTRIES RESEARCH & DEVELOPMENT CENTRE, Kaohsiung, TAIWAN
Schrauben Innengewinde Nanofinger

Mechanical materials

  • Measurements of the inside of an internal screw thread with 1.4 mm diameter cut into an alumina block.
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CNC

  • Measurment of knife edge of a cutting tool for a CNC milling machine.
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SMD Chip

  • Measurement of SMD chips that are fixed on PCB boards by micro adhesive bonding and filled with conductive adhesive.
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MEMS device

  • Measurements of MEMS devices. The flexible structure of such devices are not damaged during the measurment.