The system includes two modules NMT 50 as xy-stage with 50mm x 50mm stroke on the base, one NMT-Z20 and an NMG Nanomotor Gripper combined with a calibrated force sensor. The force sensor detects the force applied with the gripper in z-direction.
In this setup the xy-stage is placed at the bottom and the NMT-Z20 comes from the top to lift the gripper up and down. So the gripper stays in the focus of a microscope. In another setup all NMT modules can come from the top to move the gripper in x, y and z direction. All NMT modules have 1 nm resolution in movement and a repeatability better 60 nm.
This is a configuration of our Microproduction systems