The Micro Production System developed by Klocke Nanotechnik and partners bridges the gap between nanotechnology and classical mechanical engineering. It combines the advantages of both technologies: the backlash free movement with Nanometer resolution and the capability of up to kilograms of load at huge strokes. The included Nanorobotics modules offer plenty degrees of movement and a repeatability of better 60 nm per axis, a value far away from the Micrometer values of classical production systems.
The Micro Production System is available in a lot of different levels of complexity. It was the main goal during the development of this system to allow for flexibility
- Modular design, to be able to add, combine, or exchange components such as force sensors, wafer prober, manipulators, vacuum- and micro grippers or Scanning Probe Microscopes in order to produce different products, see on the right, at downloads: “Components”.
- Process control with an easy to use software.
- Integration of micro adhesive bonding technology in mechanics and software.
- Ability to scale-up the production beginning from first manually assembled samples up to fully automated mass production.
- Nanomotor
- NMT Nanorobotics tables
- NMG Nanorobotics grippers
- Micro assembly stages
- Vision system
- Micro adhesive bonding systems
- Wafer Prober
- Nano indenter
- Force Sensors and Force Feedback
- FRT Microprof®
- Manual Control Software
- Process Control Sequencer
- And plenty of other components from partners of our microtechnology Network, like Surface inspection systems,
6-axis path control, high resolution scanning base stage, …
This is a configuration of our Microproduction systems