Micro production system

The Micro Production System developed by Klocke Nanotechnik and partners bridges the gap between nanotechnology and classical mechanical engineering. It combines the advantages of both technologies: the backlash free movement with Nanometer resolution and the capability of up to kilograms of load at huge strokes. The included Nanorobotics modules offer plenty degrees of movement and a repeatability of better 60 nm per axis, a value far away from the Micrometer values of classical production systems.

The Micro Production System is available in a lot of different levels of complexity. It was the main goal during the development of this system to allow for flexibility

  • Modular design, to be able to add, combine, or exchange components such as force sensors, wafer prober, manipulators, vacuum- and micro grippers or Scanning Probe Microscopes in order to produce different products, see on the right, at downloads: “Components”.
  • Process control with an easy to use software.
  • Integration of micro adhesive bonding technology in mechanics and software.
  • Ability to scale-up the production beginning from first manually assembled samples up to fully automated mass production.
  • Nanomotor
  • NMT Nanorobotics tables
  • NMG Nanorobotics grippers
  • Micro assembly stages
  • Vision system
  • Micro adhesive bonding systems
  • Wafer Prober
  • Nano indenter
  • Force Sensors and Force Feedback
  • FRT Microprof®
  • Manual Control Software
  • Process Control Sequencer
  • And plenty of other components from partners of our microtechnology Network, like Surface inspection systems,
    6-axis path control, high resolution scanning base stage, …

This is a configuration of our Microproduction systems