Contour Measurements
resolving small structures |
||||||||||||
1. Inner Contour:The 3D-Nanofinger® can scan along a path with varying shape. The following example shows the result of a 360 degree scan inside of an irregular structure:
Even in such structures it is possible
to make dimensional measurements and e.g. a circle fit:
2. Outer Contour:The next example describes a scan along 3 sides of a block. One aim of this measurement among others was to determine the thickness of this block: This is done by two line fits trough
the data points of the top and the bottom line, to avoid errors occurring
by the surface roughness or slopes of the block. The resulting distance of these fitted
lines is the desired block thickness. Since the lines have an angle between
each other when the block is not perfectly rectangular the resulting distance
is calculated in three values: |
|