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Contour Measurements

resolving small structures

   

1. Inner Contour:

The 3D-Nanofinger® can scan along a path with varying shape. The following example shows the result of a 360 degree scan inside of an irregular structure:

Even in such structures it is possible to make dimensional measurements and e.g. a circle fit:
Center (X0 | Y0 ) : -22337 nm | 13180 nm
Radius : 22661 nm

 

2. Outer Contour:

The next example describes a scan along 3 sides of a block. One aim of this measurement among others was to determine the thickness of this block:

This is done by two line fits trough the data points of the top and the bottom line, to avoid errors occurring by the surface roughness or slopes of the block.
Result of 2 Line fits:
f(x)= 0,000049 *x + 19142085 nm
f(x)= 0,000034 *x + -21157883 nm

The resulting distance of these fitted lines is the desired block thickness. Since the lines have an angle between each other when the block is not perfectly rectangular the resulting distance is calculated in three values:
Distance (Min | Mean | Max) = 40297392 nm| 40300129 nm| 40301933 nm

Summary:
Scanning along inner and outer contours allows dimensional and roughness measurements in a completely new manner.
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