Profile Measurements
Display Industry: Back Light Modules |
||||||||||||
Topography and dimensional measurements at back light modules for TFT LCD displays:Different light reflecting and distributing
patterns were developed within the TFT Display industry, starting from
V-grooves in different size up to 3 or 4 facet pyramid patterns. The following
3D-Nanfinger measurements were made together with our customer METAL INDUSTRIES
RESEARCH & DEVELOPMENT CENTRE, Kaohsiung, TAIWAN who also arranged
the samples. Sample 1: 4-facet pyramidsThe following sketch describes the design of a 4-facet pyramid pattern and the parameters to be measured:
The 3D topography of the 4-facet pyramid sample is measured with the 3D-Nanofinger®:
Within this dataset Linescans can be displayed to analyze the dimensional features of this sample. The periodicity, pyramid angles, structure height as well as the surface roughness can be analyzed:
The length of the Linescan is 250µm,
the distance between the measured points is 100nm.
Angle:
The two red interpolation lines for
the angle calculation are shown in the lower display. They are specified
by the two magenta resp. blue cursors shown in the upper display. The
vertical scale of the lower display is stretched.
The upper display shows the area where
the roughness analysis was carried out. Lower display, white color: measuring
length, magenta color: sample length. For this Linescan the surface roughness
on one facet was determined. The roughness values were calculated as follows:
Parameters:
Sample 2: 3-facet pyramidsThe following sketch describes the design of a 3-facet pyramid pattern and the parameters to be measured:
The 3D topography of the 3-facet pyramid PMMA sample is measured with the 3D-Nanofinger®:
Again the periodicity, pyramid angles, structure height as well as surface roughness are analyzed Distance:
The length of the Linescan is 500
µm, the distance between the measured points is 100nm. On two slopes
of the scan, some surface defects or contaminations are visible.
Angle:
Three angles were determined, by placing
linear fits into the Linescan. From top to down, the calculated values
are:
Roughness
The upper display shows the area where
the roughness analysis was carried out. Lower display, white color: measuring
length, magenta color: sample length. Parameters:
|
|