As stand-alone machine:
Arrangement with 50x50x20 mm3 stroke and thermally compensated
granite frame. This would be the "normal" setup when the
3D-Nanofinger® is used at a fixed place and not in combination with
Transportable version, "on
Arrangement with 20x20x20 mm3 stroke in a case with
transportable electronics. This design shows the compact size of the
3D-Nanofinger® and its flexible usage. The damping system is included:
simple passive rubber feet are enough! This version is recommended
when measurements are required at different places/branches and the
ultimate precision is not as important as the portability (the granite
system is thermally compensated and a bit more vibration insensitive).
Inside of CNC machines:
The 3D-Nanofinger® is so compact that it can be installed even in CNC
production machines. The metrology features of the 3D-Nanofiner allow sample and tool
control at any tim and even in automation.
Inside of a SEM and/or FIB:
The 3D-Nanofinger® is so compact that it can be installed even in
a Scanning Electron Microscope (SEM) and a Focussed Ion Beam Chamber
(FIB). The metrology features of a SEM are then expanded to the
third dimension by measuring Linescans, scans along a 3 dimensional
path (inner and outer contours), or by measuring complete 3D surface
==> leading to the first real "Dimensional SEM/FIB"
with Nanometer precision!
In particular in a FIB the 3D-Nanofinger® can determine how deep
a structure is, immediately after it was produced by the Ion Beam
of the FIB: in-situ and online quality control.
This powerfull new machine is described in detail at our
Company Website (that will open in a new browser window):
Within Universal Testing Benches:
The Universal Testing Benches from Klocke Nanotechnik allow product
development, prototyping, reverse engineering, measurement &
quality control, failure detection & analysis - with only one
system and in until now unknown precision: The accuracy of the base
stage is 50 nm.
This system can grow step by step by adding different functional
Nanomanipulators, Wafer Prober, Force Sensors, Indenters, Inspection
Systems - and naturally the 3D-Nanofinger®.
It is future-proof, spars investments and so is ideal not only
for central development departments or laboratories in industry
Within Micro Production Systems:
Micro Production Systems from Klocke Nanotechnik can include e.g.
16 degrees of movement, several micro-gripper, micro adhesive bonding
technology, a 4 axis path control system, 6 video microscopes for
pattern recognition and automatic microassembly. The system is designed
for 3D-handling, assembly and interconnection of microparts. The
precision is as good as that of the Universal Testing Benches. The
stroke of the base stage can reach up to a square meter.
This system can grow step by step like the Universal Testing Benches
without investment risks. The 3D-Nanofinger® is included not only
for dimensional measurement of microparts, but also within each
handling and assembly step to find the real height of the objects:
even a wafer has a waviness of 10-20 microns, too much for a probe
tip with 10 nm diameter.
... feel free to ask for your particular
®: Nanofinger is a registered trademark of Klocke Nanotechnik GmbH, Aachen