With the Nanoworkbench from Klocke Nanotechnik probing is very fast, easy and secure.
Possible applications are measurement of currents and voltages in 2, 3 or 4 point geometry.
The stationary in-SEM assembly of the Nanoworkbench allows NanoProbing on any position of big wafers without moving the probe tips away.
The Live Image Positioning module provides a simple point and click solution.
The Nanofinger® operating as Scout allows a fast and secure automatic approach of all probes to the sample, also on isolators. The Nanofinger® tip can also be used as one of the electrical probes.
Automatic macros and absolute positioning in superior precision allow to program measuring processes in closed loop with any feedback signal (Nanofinger®, current, force, etc)
2, 3 and 4 probe geometry
the tip of the Nanofinger® operating as Scout can also be used for electrical probing
customized tips available
1 nm tip movement resolution
repeatability better than 50 nm
20 mm tip stroke in xy, 10 mm in z-direction
low-resistivity low-noise shielded cable sets from tip to COAX connectors outside of the chamber
Nano Probing is an application package of the Nanoworkbench
Also available as a standalone module
In situ nanomanipulation system for electrical measurements in SEM M. Noyong, U. Simon, A. Rosenberger, V. Klocke et. al. Meas. Sci. Technol. 18 (2007) N84–N89 Download PDF
Generation and electrical contacting of gold quantum dots, G. Schmid & T. Reuter & U. Simon & M. Noyong et al, Colloid Polym Sci. DOI 10.1007/s00396-008-1866-2,Springer-Verlag 2008, 6pp), IOP publishing Download PDF
Nanomanipulation measurement and PIC simulation of field-emission properties from a single crystallized silicon nano-emitter T.C. Cheng, K.H.Hsu et al. Nanotechnology 18 (2007) 225503 (6pp), IOP publishing Download PDF
Single Device Characterization by Nano-probing to Identify Failure Root Cause Chao-Chi Wu, Jon C. Lee, et al. Taiwan Semiconductor Manufacturing Company, Ltd. Download PDF
Manipulation of Carbon Nanotubes inside Field-Emission ScanningElectron Microscope Seong Chu Lim, Keun Soo Kim, Kay Hyeok An, Shinje Cho, Jae-Eun Yoo, Won Bong Choi and Young Hee Lee Download PDF
An electromechanical material testing system for in situ electron microscopy and applications Yong Zhu and Horacio D. Espinosa Download PDF
A microelectromechanical load sensor forin situ electron and x-ray microscopy tensile testing of nanostructures Yong Zhu, N. Moldovan and Horacio D. Espinosa Download PDF