Rotary Drive

The piezoelectric Rotary Drives from Klocke Nanotechnik GmbH can rotate tools and samples with high precision and defined speed in open loop.

The rotary drive is fully integrated in our systems so it can be added to all Nanoworkbench applications and all micro production systems.

  • max speed: 6 degree/sec
  • resolution: 3 millidegree

Since this tiny drive is not equipped with a position sensor it can be used after an automation process.

One of the featured applications is the TEM lamella handling process inside of SEM/FIB Systems, to rotate tip and/or sample after the absolute positioning handling tasks.

For closed loop rotations we offer the combination of a Z-movement and a tool rotation (0┬░-90┬░) within one Nanomanipulator.