Classification of the instrument:
The 3D-Nanofinger® covers the features
of Profilometers and 3D Coordinate Measuring Machines. The following table
with typical values gives an overview about the different principles:
| |
Profilometer
|
Coordinate Measuring Machine
|
3D-Nanofinger®
|
| Axes with precise movement |
2-dimensional (XZ) |
3-dimensional (XYZ) |
3 dimensional (XYZ and along a path) |
| Surface roughness measurement |
Yes, in 2D |
normally: No |
Yes |
| Dimensional measurement |
Yes, but only in one direction along an actuator axis |
Yes, in X,Y and Z |
Yes, in XYZ and along a path (e.g. a hole) |
| 3D topography measurement |
normally: No |
normally: No |
Yes |
| Sensor diameter |
around 0.2 - 1 micron
|
around a few mm
|
around 30 nm - a few mm |
| Stroke |
several cm in X, some mm in Z, sometimes more. |
several cm in X,Y,Z |
several cm in X,Y,Z and along a path |
| Objects to measure |
Coarse structures, to be measured from one side along one fixed
actuator axis |
Coarse structures, to be measured from 5 sides |
Coarse and fine structures from 1-5 sides, measurement along and
into them, e.g. into thin holes or grooves => movement not only
along the actuator axes. |
| Integration as module |
No, only stand-alone machine |
No, only stand-alone machine |
Yes, e.g. into Scanning Electron and Ion Microscopes (SEM/FIB),
CNC cutting or grinding machines, Universal Testing Benches or Micro
Production Systems |
| Automation |
No |
No |
Yes, within a series of more than 200 Nanorobotics components |
The upper table may not be correct
for an individual machine, but it describes general features of the different
machine classes. In comparison with standard Profilometers the 3D-Nanofinger®
has three equivalent axes of movement and allows the measurement along
a path, not only along one axis. This can be used to measure along inner
and outer contours.
With an optional double-head sensor it is possible to determine an outer
thickness or inner distance of objects by differential measurements, e.g.
the distance of 2 opponent V-grooves of a linear ball bearing slide.
The 3D-Nanofinger® is available in several different arrangements.
It can be used as stand-alone measurement machine, installed in Scanning
Electron and Ion Microscopes (SEM/FIB) or as module hanging at the granite
bridge of a Universal Testing Bench or a Micro Production System. All
versions are available from:
®: Nanofinger is a registered
trademark of Klocke Nanotechnik GmbH, Aachen
|
Request
for additional information
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