Sensing Principle:

The "Nanofinger®" sensor is a small MEMS device that detects the distance between a probe tip and a sample. The following graph describes the signal output of this device during a tip approach:

In a distance of about 10 nm the Nanofinger® sensor "feels" the sample by measuring the Van-Der-Vaals forces between sample and tip - without touching the sample. The shape of the intensity-distance curve in the area between 0 nm (contact) and about 10 nm is independent from the properties of the sample, conductivity is not necessary. When the output signal is compared with a certain selectable level (e.g. 75% amplitude) this level is related to a calibrated distance between Nanofinger® sensor and sample (in this example e.g. 5 nm). The position resolution of this sensor is 0.5 nm.

Measurement Directions:

The Nanofinger® sensor can be assembled vertical or horizontally:

Even a set of them can be fixed at one manipulator, e.g. for differential measurements or thickness measurements.