Manipulators

The patented Nanomotor is the heart of any manipulator. Three independent linear stages are used in every single manipulator. The manipulator provides 0.5 nm resolution in all three axis. All manipulators can be used in air setups or inside of electron microscopes. Docking stations allow an easy transport between any setup.

  • Cartesian systems
  • 1 nm resolution
  • 5-20 mm stroke
  • absolute positioning
  • Stationary assembly
  • Automation
  • Wide range of accessories

Manipulators are a combination of three independent linear stages. The standard model provides two 20 mm stages in x-y direction and a 10 mm linear stage in z direction. Other models are available upon request.

Cartesian movement
Independently in x-, y- and z-axis, for predicable manual movement (in contrast to tilting manipulator movements that mix the directions).
Roof mounting
Keeps the sample stage independent from the manipulator and so enables plenty of new applications (e.g. particle sorting). The manipulator tools are always in the view field of the SEM and can be used at any point of the samples, also at large samples.
Docking station
Allows fast and easy plug in and plug out of the manipulator by the user, e.g. for -having more space in the chamber -convenient exchange of a tool at the manipulator outside of the chamber -usage of the manipulator in air or in another chamber to reduce investment
Upgrade within Nanomanipulator types
Budget limitations often reduce the range of applications forever. With the Nanorobotics System from Klocke Nanotechnik this problem is solved. Our upgrade concept allows a very easy upgrade from Entry Model over the Medium Class Manipulator to the High End Manipulator.

In Addition to the features of the Entry Model:
Easy Usage: A part of the High End Manipulators intelligent software modules and macros can be used.
Secure Usage: Besides Cartesian manual movements the most critical vertical movements are protected by -Position status of all samples and vertical distance status of manipulator tools -Basic software assistants and macros
Assistant for crash-free operation: The unique combination of approach sensor, position measurement and intelligent software allows a crash-free operation in the vertical direction. The risk of a sample or tool damage is reduced for one operation direction, and the durability of tools is increased accordingly.
Fast tool approach: The optional available 1D-Nanofinger® approach sensor allows a secure automatic tool approach towards samples: -In a few seconds -Even towards isolators -For wire shaped tips -For cutting tips -For piezo grippers

In Addition to the features of the Entry and medium Class Model:
Easy Usage: All High End Manipulators intelligent software modules and macros can be used.
Secure Usage: Besides Cartesian manual movements the most critical vertical movements are protected by -Position status of all samples and vertical distance status of manipulator tools -Basic software assistants and macros
Assistant for crash-free operation: The unique combination of approach sensor, position measurement and intelligent software allows a crash-free operation in the vertical direction. The risk of a sample or tool damage is reduced for one operation direction, and the durability of tools is increased accordingly.
Fast tool approach:
The optional available 1D-Nanofinger® approach sensor allows a secure automatic tool approach towards samples:

  • In a few seconds
  • Even towards isolators
  • Vertically and from the sides
  • For wire shaped tips
  • For cutting tips
  • For piezo grippers

Standard features

  • Cartesian movement of independent axes (important for an easy operation)
  • Absolute positioning vertical axis (in the “blind” direction of a SEM)
  • Optional position sensors also for XY axes, repeatability better 60 nm
  • Small design (to fit in any chamber)
  • Many options to fix tools easily
  • Robust (crash resistant)
  • Movable (by hand or by collisions) without losing the position information
  • Pure piezo drive from nm to cm stroke (no electro motor coupled with a piezo)
  • Resolution of single Nanometers
  •  A real fine positioning stroke of at least 1 micron
  • Vibrations of the whole manipulator below 10 nm
  • Stroke selectable in a range between 5 and 50 mm
  • Modular design to choose size and stroke for each axis
  • Stationary assembly => sample can move independent from manipulator.
  • “Micro-Jackhammer” mode (with e.g. 50 G accelerations) to process material
  • Network Electronics with external intelligence for compatibility with any SEM or FIB

Optional features

  • Secure approach of the sensor/actuator by different probe techniques
  • Micro grippers
  • Upgrade to Wafer Probing Systems
  • Option as Micro Tensile Machine available
  • Option of Vision System for pattern recognition available
  • Plenty expendable items available: Small sensors and actuators including adapters
  • Absolute positioning sample stages (2-5 DOF) available, to complete systems.
  • Software on three levels: DLL, Manual Control (keypad), Automation by Macros & Process Control Sequencer.