NanoCleaning is used when particles stick on the surface of expensive samples and cannot be wiped away e.g. in a chemical bath. Typical applications are cleaning after mask repair or glass master cleaning in Semiconductor industry.
The requirement for NanoCleaning is a fast semi-automatic process. With the Nanoworkbench from Klocke Nanotechnik NanoCleaning is very fast, easy and secure.
This application package is part of the Nanoworkbench